ShanghaiTianmaMicroelectronicsCo.,LtdLTPSLTPS工艺流程与技术工艺流程与技术AMOLEDAMOLEDZhaoBenGangZhaoBenGangSHANGHAITIANMAMICRO-ELECTRONICSCO.,LTD.2a-SiLTPS,andprocessa-SiLTPS,andprocessKeyprocessofLTPSKeyprocessofLTPSLTPSprocessflowLTPSprocessflow目录目录SHANGHAITIANMAMICRO-ELECTRONICSCO.,LTD.3LTPSLTPS:LowTemperaturePoly-Silicona-SiLTPS,andprocessa-SiLTPS,andprocessSHANGHAITIANMAMICRO-ELECTRONI...
